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| Tier 1 PN | 12PMON65nm |
|---|---|
| Diameter (mm) | 300mm |
| Type | P |
| Dopant | Boron |
| Resistivity (Ω cm) | 1-100 |
| Crystal Orientation | 100 |
| Notch Orientation | Any |
| Thickness (µm) | 773.3±6.2 |
| TTV (µm) | <1 |
| Flat | Notch |
| BOW | <30 |
| Warp | <30 |
| Particle | <50 |
| Surface | Double Side Polished (DSP) |
