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| Tier 1 PN | 12TEOS20K |
|---|---|
| Diameter (mm) | 300mm |
| FILMS | TEOS |
| Type | P |
| Dopant | Boron |
| Resistivity (Ω cm) | 0-100 |
| Crystal Orientation | 100 |
| Notch Orientation | Any |
| Thickness (µm) | 700 |
| TTV (µm) | <50 |
| Flat | Notch |
| BOW | Any |
| Warp | Any |
| Particle | <200@.3µm |
| Surface | Double Side Polished (DSP) |
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