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| Tier 1 PN | 4N0 1-10 PRM |
|---|---|
| Diameter (mm) | 100±0.5 |
| Type | N |
| Dopant | Phos |
| Resistivity (Ω cm) | 1-10 ohm-cm |
| Crystal Orientation | <100> |
| Thickness (µm) | 525±15µm |
| TTV (µm) | <5 |
| Flat | 1 Flat |
| BOW | <30 |
| Warp | <30 |
| Particle | 20@0.3µm |
| Surface | SSP |
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