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Tier 1 PN | 12PMON37nm |
---|---|
Diameter (mm) | 300mm |
Type | P |
Dopant | Boron |
Resistivity (Ω cm) | 5-25 ohm |
Crystal Orientation | 100 |
Notch Orientation | Any |
Thickness (µm) | 760-790 |
TTV (µm) | <1 |
Flat | Notch |
BOW | <30 |
Warp | <30 |
Particle | <50@0.037 |
Surface | Double Side Polished (DSP) |